- PID
- 3728035
Spin Coater
1. High-performance, compact type spin coater
2. Precision Spin Coater that maintains high precision not only at high speed (10,000 RPM) but also at low speed (50 RPM)
3. Equipped with real-time graphic mode (Graphic Mode) (patented) so that coating data can be checked in real time
4. Low noise, low vibration (BLDC motor)
5. Up to 100 programs and 100 steps can be input
6. Up to 3,000 RPM acceleration/deceleration per second
7. Excellent position control function when sudden stop instruction is given
8. Stable coating even at low and high RPM
9. Low running cost
10. Compact design makes maintenance and A/S simple
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- Quantity
- MOQ : 1 Sets
Product Summary
2. Precision Spin Coater that maintains high precision not only at high speed (10,000 RPM) but also at low speed (50 RPM)
3. Equipped with real-time graphic mode (Graphic Mode) (patented) so that coating data can be checked in real time
4. Low noise, low vibration (BLDC motor)
5. Up to 100 programs and 100 steps can be input
6. Up to 3,000 RPM acceleration/deceleration per second
7. Excellent position control function when sudden stop instruction is given
8. Stable coating even at low and high RPM
9. Low running cost
10. Compact design makes maintenance and A/S simple
Detailed Description
• Wafer Size (Max.): ~ 100mm (4) Diameter (6" at low speed)
• Bowl Material: SUS (can be processed from synthetic resin material)
• Bowl Size (inner diameter): SUS 235 m/m
• BLDC Servo Motor (Speed Up & Down free: special drive motor)
• Step: 100, Memory Storage: 100 Program
• Rotation Speed: 0 to 50 ~ 10000 rpm
• Run Time: 1~999sec
• Accuracy: ±1 R.P.M.
• 3,000 RPM /sec (acceleration/deceleration)
• Power Input: AC 220V, 50/60Hz
• Vacuum Input: -450~-650mmHg (6mm ID / 8mm OD)
• Display: LCD (Back Light)
• System Controller: Digital Type (Microprocessor)
• Dimension (W
• Real-time step-by-step data can be viewed as graphics or characters (patent certified)
• CE Certificated No: KCT-18-CE1010
