- PID
- 3028754
Carbozen Series - C for DLC coating
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Detailed Description
CARBOZENTM-C (PECVD:Plasma Enhanced CVD) SERIES is in the CVD method which usesplasma and it demands decompose ion gas, utilizing a generated glow discharge.
◆ System Specification
|
Chamber Size |
Custom-made |
|
Working Gas |
Mass flow control system Ar, O2, C2H2, CH4, C6H6, etc |
|
The Initial Vacuum Degree |
~ 10-6 Torr |
|
Bias Power |
13.56 MHz (RF) |
|
Device Operation |
Automatic / Semi-automatic |
|
Cooling System |
Water cooled |
◆ DLC characteristics deposited by Carbozen-C
|
Ion Plating Rate |
Max. 70 nm/min (depending on the process parameters) |
|
Residual Stress |
~ 2.0 GPa |
|
Hardness |
~ 18 GPa |
|
Friction coefficient |
~ 0.1 |
|
Surface roughness |
‹ 0.1 nm |
◆ Applications
- Plane DLC : Light guide plates, CD molds and coin heads for specular display components
- Inner DLC : Compressor parts for refrigerators and chemical plant pipes
