[Product Description]

PECVD ACL equipment is essential for the front end process of semiconductor manufacturing. It deposits an Amorphous Carbon Layer(ACL) on the surface of a wafer by generating the plasma in a vacuum chamber.

TES is the first and only local equipment manufacturer that successfully adopted PECVD ACL equipment for mass production among of local device companies.

With the increasing concentration and micronization of semiconductor devices, the application and frequency of using PECVD ACL equipment is rising.

Also, since TES PECVD ACL equipment has excellent price and quality competitiveness against foreign major companies, market share is expected to rise continually.

[Product Features]

1. Wafer Size : 12 inch (300mm)
2. Process Application 
   - PE-SiH4, ACL (Amorphous Carbon Layer)
   - SiN, SiON (HM , IMO1/2, Arc, Pass2 Dep.)
3. Excellent mechanical throughput 
   - EFEM : 400WFS ≥ 
   - Vacuum robot : 400WFS ≥ 
   - W/AL : 230WFS ≥
4. Outstanding Productivity

[Company Introduction]

TES Co.,Ltd

Name : RAE HYUNG SONG Tel : +82-31-323-2552 (ext. 106)

Homepage :  http://www.hites.co.kr

TES(Technology Engine of Science) aims to become the new growth engine for the development of scientific technology in future and to change the quality of life by challenging to the future with new vision.
TES Co., Ltd. was established by equipment development experts in order to locally develop equipments with proprietary for manufacturing semiconductors in Korea.
Over the past decade, TES has been among the world's leading manufacturer of PECVD ACL equipment.
Also, TES advanced in solar cell equipment field based on its R&D capability and experience in semiconductor equipment development.
TES aims to be the global leader in semiconductor and solar cell equipments manufacture in the 21st century.