- PID
- 3096099
Dual L-Motion Valve
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Semiconductor, Dry etching process, Vacuum, Vacuum Valve,
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Detailed Description
- When Actuator is replaced, only applicable PM is down and run can proceed
- VAT Actuator guarantees 2 million cycles and contributes to improve equipment utilization rate and productivity
- E4, e5 door plate to improve particle effect
- Retrofit time is minimized by using existing V2 Rocker Valve Housing
- Replacement time 2 hours / CH - Standard VAT Actuator Separate TM and PM Separate Maintenance Costs
- Easy Maintenance
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